300,000 tulaga fa'amamaina o le pefu

Fa'amatalaga Puupuu:

E tusa ai ma le tulaga masani "Cleanrooms and Related Controlled Environments", o le mama e faasino i le maualuga o le faʻatagaina o le faʻaogaina o vaega o popolega (o le iunite o le numera o vaega i mita kupita o le ea).


Fa'amatalaga Oloa

Faailoga o oloa

Tulaga mama ole ea ISO14644-1 (tulaga fa'avaomalo)

 

Tulaga mama ole ea ISO14644-1 (tulaga fa'avaomalo)

Tulaga mama ole ea(N) Fa'atapula'a fa'atonuga maualuga o mea'ai e sili atu pe tutusa ma le lapo'a fa'ailoga (numera o vaega ea/m3)
0.1um 0.2um 0.3um 0.5um 1.0um 5.0um
ISO Vasega1 10 2        
ISO Vasega2 100 24 10 4
Vasega ISO3 1,000 237 102 35 8
ISO Vasega4 10,000 2,370 1,020 352 83
ISO Vasega5 100,000 23,700 10,200 3,520 832 29
Vasega ISO6 1,000,000 237,000 102,000 35,200 8,320 293
Vasega ISO7       352,000 83,200 2,930
Vasega ISO8       3,520,000 832,000 29,300
Vasega ISO9       35,200,000 8,320,000 293,000

 

Fuafuaga fa'atusatusaga o togi mama i atunu'u 'ese'ese

PCS/M≥0.5um ISO

14644-1(1999)

US

209E(1992)

US

209D(1988)

EEC

cGMP(1989)

FALANI

AFNOR(1981)

SIAMANI

VDI 2083(1990)

IAPANI

JAOA(1989)

1 - - - - - - -
3.5 2 - - - - 0 2
10.0 - M1 - - - - -
35.3 3 M1.5 1 - - 1 3
100 - M2 - - - - -
353 4 M2.5 10 - - 2 4
1,000 - M3 - - - - -
3,530 5 M3.5 100 A+B 4,000 3 5
10,000 - M4 - - - - -
35,300 6 M4.5 1,000 1,000 - 4 6
100,000 - M5 - - - - -
353,000 7 M5.5 10,000 C 400,000 5 7
1,000,000 - M6 - - - - -
3,530,000 8 M6.5 100,000 D 4,000,000 6 8
10,000,000 - M7 - - - - -

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